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MODEL 6610

Precision Pressure Regulator for Low pressure MODEL 6610.This valve has been developed for better repeatability and quick, reliable pressure regulation by increasing the accuracy
of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.

■Secondary control pressure:Gas 0.01~0.15MPa(G)
■Max.flow rate:5L/min



□ High-precision regulation on the low-pressure side
High regulation performance with repeatability of ±1% or less when the pressure on the primary side and load resistance on the secondary side change under the set pressure condition of
0.01–0.15 MPa.
□ Non-grease specification
The sections in contact with gas are made of stainless steel, Viton, and Teflon without using grease. This valve is ideal for the semiconductor industry which requires ultra-clean conditions.
□ Lock nut
The regulating position, once it has been set, can be fixed by a lock nut to prevent the setting from changing.
□ Non-bleed type
This non-bleed type valve prevents gas from leaking to the outside


□ Gas chromatography
□ High-purity gas control
□ Low-pressure controllers
□ Semiconductor industry

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